W-SEM

VEGA3 SB Easy Probe is a compact SEM fully integrated with a selected energy dispersive X-ray microanalyser (EDX). Superior imaging quality, high level of automation, easy usage and quick quantitative elemental results directly in the live image are among the characteristic features of the instrument.  Equipped with the SB chamber and stage.

VEGA3 SB SEM comes with conventional tungsten heated cathode supporting both high vacuum and low vacuum operations. It is equipped with the SB chmaber and stage. SB stage travel (x,y,z,r,t,z') is 45mm, 45mm, 27mm, 360o, +-90o, 6mm.

VEGA3 LM SEM with a step up in size of chamber and stage (LM) and with conventional tungsten heated cathode supporting both high and low vacuum operations. LM stage travel (x,y,z,r,t) is 80mm, 60mm, 47mm, 360o, +-80o.

VEGA3 XM SEM with a step up in size of chamber and stage (XM) and with conventional tungsten heated cathode supporting both high and low vacuum operations. XM stage travel (x,y,z,r,t) is 130mm, 130mm, 100mm, 360o, -300   +900.

VEGA3 GM SEM with yet another step up in size of chamber and stage (GM)  and with conventional tungsten heated cathode supporting both high and low vacuum operations. GM stage travel (x,y,z,r,t) is 130mm, 130mm, 100mm, 360o, -80o   +90o.

The VEGA SEM family of tools can be equipped with a LaB6 emitter for higher current density and longer lifetime.

Standard components with the VEGA:

  • SE - secondary electron detector Everhart-Thornley type (YAG Crystal)
  • Motorized Retractable BSE - retractable annular backscattered electron detector scintillator type (YAG crystal) with high sensitivity and atomic number resolution (0.1)1
  • pA Meter - Probe Current Measurements
  • Touch Alarm stops movements when sample touches any part of the chamber
  • IR TV Camera for live „Chamber View“

1 Standard for LoVac,  optional for High Vac

Optional components:

 

  • LVSTD (up to 500 Pa) - original SE detector for low vacuum operations, modified Everhart-Thornley type, U.S. Patent No. 7,193,222 B2
  • LVSTD (up to 1000 Pa) – N2 conditions
  • LVSTD (up to 1000 Pa) – water vapor/N2 conditions
  • Retractable Dual Scintillator BSE Detector*
  • Retractable 4-Quadrant semiconductor BSE Detector*
  • STEM detector - scanning transmission electron microscope detector; Bright Field and Dark Field imaging 
  • R-STEM - motorized retractable version of STEM detector with standard TEM grids holder
  • CL Detector* - panchromatic cathodoluminescence detector, two wavelength ranges 
  • available: 350 nm – 650 nm; 185 nm – 850 nm
  • Rainbow CL* - retractable color as well as panchromatic cathodoluminescence detection in separate channels. RGB image processing is fully integrated in microscope control software; no external scanning, wavelength range 350 nm – 850 nm
  • Compact CL - modified CL detector specially designed for simultaneous CL and BSE detection 
  • Rainbow CL (Compact) - modified Rainbow CL detector specially designed for simultaneous CL and BSE detection
  • Al-coated BSE* specially designed BSE detector for simultaneous CL and BSE detection
  • EBIC - Electron beam induced current detection
  • EasyEDX** - super-integrated O.E.M. EDX microanalyser
  • EDX** - take off angle: 35° at WD 15 mm; 30° at WD 10 mm
  • WDX** - take off angle: 35° at WD 15 mm; 30° at WD 10 mm (only EDAX) 
  • EBSD** - electron backscattered diffraction


* motorized mechanics as an option
** fully integrated third party products