Add-on Technology and System Accessories

Most SEM and FIB/SEM systems need add-on technology and accessories to meet user requirements and to perform the desired applications. The following (partial) list of add-on technology and options are the enablers of the base SEM or FIB/SEM multiplying its performance and value.

STEM Detector
Transmission electron microscopy is widely used in the field of Life Science or Material Engineering. Therefore TESCAN has developed an adaptor that provides a complementary method for image acquisition of the transmitted electrons - scanning transmission electron microscopy detector (STEM).

Retractable STEM Detector
The retractable STEM detector (R-STEM) is a new version of the STEM detector in addition to the fixed STEM detector version. The detector is designed with the respect to broad application range of the STEM in SEM/FIB-SEM.

In-Beam SE Detector
High efficiency SE detector is placed in the objective lens.

In-Beam Back Scatter Detector
High efficiency Back Scatter Detector placed above the objective lens in the SEM column allowing for efficient back scatter imaging at low kV and excellent to use with the Beam Deceleration option.

Retractable Back Scatter Detector
Retractable backscattered electron detectors with high sensitivity and high atomic number resolution. Excellent material and topography contrast. The newly released Low Energy (LE-BSE) BSE allowing excellent imaging of non conductive samples.

LVSTD, Low vacuum detector
The Low Vacuum Secondary Electron TESCAN Detector is a unique solution developed and patented by TESCAN. A modified Everhart-Thornley design equipped with a YAG scintillator.

Beam Deceleration Technology (BDT)
Enable lowering of the landing energy for better low kV imaging while maintaining high efficiency back scatter imaging.

Rainbow CL - new Color detector
The new Rainbow CL detector with outstanding performance and 4x higher sensitivity compared to common CL detectors!

Multi Gas Injection system.
TESCAN MultiGIS is a robust 5 gas chemistry solution for SEM and FIB/SEM. Customer selects what gas configuration fits best. The MultiGIS has 5 independent gas delivery needles allowing for clean-contamination-free, high performance and reliable gas delivery for deposition, enhanced etch or selective etch applications.

Mono GIS.
TESCAN single gas chemistry solution for SEM and FIB/SEM. Cost effective if only one or two gases are required.

Control Panel
TESCAN offers a SEM Control Panel as another option to the standard controllers like multipurpose trackball or EasySEM™ touch screen control interface.

Nanorobotics Manipulators are optional accessory expanding the TESCAN FIB and SEMs to a material processing and analytical Workbench.

AutoLoader - Automated Loading System for TIMA
With the newly developed Automated Loading System (AutoLoader), the TIMA has become the first automated mineral analyzer which permits robust, continuous and unattended sample loading. With the AutoLoader (robotics) system which allows accommodation of up to 100 epoxy blocks of 25mm or 30 mm diameter at one time, the TIMA has emerged as a powerful plant support instrument. It increases the sample throughput, minimizes manual labor and enables 24/7 operations.

TESCAN SEMs can be equipped with Manual or Automated loadlocks.

GSR kits
TESCAN TRACE GSR is an automatic all-in-one GunShot Residue analysis package, combining a TESCAN SEM, an EDX analyzer and excellent classification software. All TESCAN SEMs complies with the current ASTM E1588 standard guide for GSR and has already proven its capabilities in forensic labs worldwide.

Peltier Stage
With a temperature range of -50°C to +70°C, the TESCAN integrated Peltier stage can be a valuable addition.

Rocking Stage
The high quality of the cross section surface is crucial, with no damage or curtaining artifacts. To be able to detect small structures, it is also important to stop FIB milling (accurate end pointing) at the right time, by utilizing SEM observation during the cross section polishing process.

Rocking stage:

The principle of the novel multi-tilt sample stage allows SEM observation during FIB milling process even when sample requires milling from multiple directions to reduce the curtaining effect.

Utilizing the multi-tilt sample stage by alternating the stage tilt (angles +10°, -10°) in the cross section plane. Allowing SEM observation during FIB milling is invaluable to be able to stop FIB milling in the center of the bump accurately and at the same time minimizing the curtaining artifacts.

Additional Accessories supported and/or integrated by/into TESCAN systems:

EDS: All EDS manufacturers supported as well as 3D EDS.

EBSD: All EBSD manufacturers supported. as well as 3D EBSD.

WDS: All WDS manufacturers supported.

3D techniques: 3D EDS and 3D EBSD applications combining a SEM with focused ion beam (FIB) such as TESCAN LYRA3 microscope, EDS and EBSD can be extended to a fully three dimensional (3D) analytical techniques. These techniques are possible with OXFORD and EDAX analyzers

Cryo-SEM and FIB/SEM: Many Cryo manufacturers supported.

RAMAN: See the Rise Microscope by TESCAN and WITec.

Pico Indentors from many manufacturers

CL: Integrated CL available, see TESCAN web site for the many CL detectors to choose from.

NanoManipulators: Many brands of manipulators supported. See TESCAN web site.

Plasma Cleaner: SEM and FIB/SEM systems can be equipped with integrated plasma cleaner.

Microtome: The Gatan 3View option is available for integration into TESCAN FEG SEM products

TOF-SIMS: Integrated TOF-SIMS for dual beam FIB/SEM systems allowing for high surface-sensitive spectroscopy, 3D mapping, distinguishing of isotopes, etc. See TESCAN web site for more information.

Tensile/compression and Indenter stages: For in-situ work in material science and life science bio-material. 

Heating and cooling stages: For in-situ work.

In-Situ Work

For In-Situ Electron Microscopy, we integrate supporting components into the SEM or FIB/SEM. The SEM – FIB/SEM can be equipped with Optional  Low Vacuum and Analytical imaging (EDX, EBSD, WDX, SIMS, Raman) as well as a large selection of detectors (such as SE, BSE, STEM, LVSTD, see above).