The LYRA3 FEG is a favorable combination of SEM and FIB for demanding users. It is based on a high resolution Schottky FEG-SEM column and a high performance FIB column.

This new generation of field emission scanning electron microscopes (LYRA3 series) provides users with the advantages of the latest technology, such as new improved high-performance electronics for faster image acquisition, an ultra-fast scanning system with compensation for static and dynamic image aberrations or built-in scripting for user-defined applications, all the while maintaining the best price to performance ratio.

Analytical Potential

  • XM chamber model provides superior specimen handling using a full 5-axis motorized compucentric stage and ideal geometry for EDX and EBSD
  • Option of extra-large XM chamber with robust stage able to accommodate large samples
  • Numerous interface ports with optimized analytical geometry for EDX, WDX and EBSD as well as for attaching many other detectors
  • First-class YAG scintillator-based detectors
  • Selection of optional detectors and accessories
  • Full operating vacuum can be obtained quickly and easily
  • Investigation of non-conductive samples in variable pressure mode versions, favorable conditions for the investigation of magnetic samples, non-distorted EBSD pattern compared to immersion magnetic lenses
  • Integrated active vibration isolation ensures effective reduction of ambient vibrations in the laboratory.

A SEM with Schottky field emission cathode in combination with gallium Focused Ion Beam (FIB) column and optionally with Gas Injection System (GIS). Oustanding optical properties, flicker-free digital image with super clarity, sophisticated user-friendly software for SEM/FIB/GIS control and image capturing with easy image management, processing and measurements, automatic set up of the system and many other automated operations are characteristic features of the equipment.

Analytical Potential

  • High brightness Schottky emitter for high-resolution / high-current / low-noise imaging
  • Extraordinary resolution with powerful optional In-Beam SE Detector
  • Unique three-lens Wide Field Optics™ design offering the variety of working and displaying modes embodying the TESCAN proprietary Intermediate Lens (IML) for the beam aperture optimization
  • Real time In-Flight Beam Tracing™ for the performance and beam optimization integrating the well-established software Electron Optical Design. It includes also direct and continual control of beam spot size and beam current
  • Fast imaging rate
  • Beam Deceleration Technology (BDT) for excellent resolution at low beam voltages (optional)
  • In-Beam BSE Detector for BSE imaging at very short working distances (optional) suitable even for ferromagnetic samples imaging
  • High-throughput large-area automation, e.g. automated particle location and analysis
  • Superior specimen handling using a motorized compucentric stage
  • Ideal geometry for EDX and EBSD; non-distorted EBSD pattern
  • Fast and easy obtaining of the clean chamber vacuum by powerful turbomolecular and dry fore vacuum pump; electron gun pumping by ion getter pump
  • Fully automated microscope setup including electron optics setup and alignment
  • Network operations and built-in remote access/diagnostics, all come as the TESCAN standard
  • Unique live stereoscopic imaging utilizing the 3D Beam Technology
  • Extended low vacuum mode with chamber pressure up to 500 Pa for non-conducting specimens imaging
  • Unique ion optic column differentially pumped (2 ion getter pumps) for ultra-low ion scattering effect
  • Motorized aperture changer in ion column with ultra-high reproducibility
  • Beam Blanker and Faraday cup included as standard accessories for ion column
  • Ultra-high resolution and excellent performance at high current with optional Cobra column
  • Automatic FIB cutting and signal acquiring followed by 3D reconstruction (tomography), allowing 3D EBSD, 3D EBIC etc. with integrated 3D visualization
  • Sophisticated software for SEM/FIB/GIS control, image acquisition, archiving, processing and analysis; multi-user environment localized in many languages

3D FIB tomography is a method specific to FIB-SEM systems. It is based on serial SEM imaging of FIB-prepared cross-sections and subsequent 3D reconstruction and visualization All the necessary steps are fully automated in the new 3D Tomography software module.

The 3D Tomography software module is a fully integrated part of TESCAN control software. The module consists of :

  • Milling and image acquisition wizard
  • Data post-processing
  • 3D reconstruction and visualization