UHR SEM Technology

TESCAN introduces the TriglavTM column, a high-performance electron column which achieves ultra-high resolution at low beam energies. Equipped with a newly designed electron optics and robust detection system, the TriglavTM column provides scientists and technologists with ultimate surface sensitivity and outstanding contrast to resolve nano-sized features of beam high-sensitive or nonconductive samples.

The Triglav technology is included in MAIA3 SEM, GAIA3 FIB/SEM and XEIA3 Plasma FIB/SEM.